Hitachi S8820/S8840/S9220/S9260 CD-SEM
Hitachi S4200/4500/4700/5000/5500 FE-SEM
Hitachi CD-SEM Recipe Server&Data Station(B180L&B2600)
KLA21XX Defect Inspect Station
KLA2550/2551/2552 Data Analysis Station
YMS Software:Datamanager/MiDEWS/Smartview(代替KT Klarity)
KLA-Tencor Surfscan Tencor6XX0/SP1 Particle Counter
KLA-Tencor FLX2320/FLX5200/FLX5400 Stress Tool
KLA-Tencor 5100/5200/5200XP/Archer10 Overlay Tool
KLA-Tencor Leica3000 OM Review Station
KLA-Tencor F5/FX100/FX200 Series thickness Tool
KLA/Omnimap RS35/55/75 RS Prober
Olympus MX50/51/61 Microscope
Novellus C1/C2 Series CVD Tools