Ion Sputter Coater and PT Target

Target head for easy to access to specimens stage.
2. Sputter : Single Top Electrode Discharge System.
3. Easy to operate Pirani Type Vacuum gauge with meter.
4. High speed coating for reduce heat damage to sensitive specimens.
5. All shapes, size coating uniformly
6. Compact design maximized limited space.
Features

SPECIFICATION (HC-21)

1. Sputtering System : Top Electrode Discharge System
2. Working Pressure : ~10-1 Pa (~10-3 Torr)
3. High Tension power : DC 0 ~ 1.2 kV (Continuously variable)
4. Target : 57mm dia Au disk (Standard) or Carbon
5. Vacuum Monitor : Pirani sensor control
6. Time unit range : 0.1sec, sec, min, hour
7. Vent gas : Air / Ar / N
8. Power : 220VAC, single Phase
9. Dimension(mm) : 300(H)X430(W)X320(D) ;
Chamber 120(Dia)X110 (H)
10. Weight (kg) : 15