Used for Hitachi S9XXX/CG4000 CD-SEM
Water Circulating Chiller(Do not need PCW, Low Cost Solution for Common Chiller).

Features
1. Low noise and High performance compressor to make trouble-free and stability.
2. Specifically designed over-load protecting device.
3. Easy to operate digital temperature controller to make set point resolution precisely.
4. Compact design maximized limited space.
Features