• MP100-S
• MP100-ME(For Semiconductor)
• MP100-FPD（For LCD/LED/OLED）

• Solar energy substrate
• LED substrate
• LCD panel
• CD
• Laminating glass, the force that press a gram

• Target head for easy to access to specimens stage
• Sputter : Single Top Electrode Discharge System
• Easy to operate Pirani Type Vacuum gauge with meter
• High speed coating for reduce heat damage to sensitive specimens
• All shapes, size coating uniformly
• Compact design maximized limited space

• Used for Hitachi S9XXX/CG4000 CD-SEM
• Water Circulating Chiller(Do not need PCW, Low Cost Solution for Common Chiller)
• Low noise and High performance compressor to make trouble-free and stability
• Specifically designed over-load protecting device
• Easy to operate digital temperature controller to make set point resolution precisely
• Compact design maximized limited space

Supply new Hitachi Hitachi S8XXX/S9XXX series CDSEM devices with the original Hitachi filament and Denka OEM filament.